发明名称 Liquid ejection head and manufacturing method thereof
摘要 The liquid ejection head includes: a first SOI substrate which has a first active layer, a first dielectric layer and a first supporting layer; a second SOI substrate which has a second active layer, a second dielectric layer and a second supporting layer, the second active layer being bonded to the first supporting layer; and a nozzle which is formed between the first supporting layer and the second dielectric layer, the nozzle ejecting liquid in an ejection direction perpendicular to a thickness direction of the first SOI substrate and the second SOI substrate, a cross-sectional width of the nozzle perpendicular to the ejection direction being defined by a thickness of the second active layer.
申请公布号 US7571991(B2) 申请公布日期 2009.08.11
申请号 US20060520818 申请日期 2006.09.14
申请人 FUJIFILM CORPORATION 发明人 SUGIMOTO SHINYA
分类号 B41J2/045 主分类号 B41J2/045
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