发明名称 |
MANUFACTURING APPARATUS, INFORMATION PROCESSING METHOD, AND RECORDING MEDIUM HAVING PROGRAM THEREON |
摘要 |
<p>A manufacturing apparatus, an information processing method, and a recording medium having program are provided to improve management efficiency of a part by managing and updating a use history of the part. A part identifying information receipt part(31) receives identifying information of a part used in a manufacturing apparatus(30). A part quality information receipt part(32) receives part quality information of the part identified by the part identifying information. A part quality correspondence information storage part(33) stores part quality correspondence information including the part identifying information and the part quality information. A part quality correspondence information managing part(34) updates the part quality correspondence information by using the part identifying information and the part quality information. A part removal detecting part(35) detects a removal of the part from the manufacturing apparatus.</p> |
申请公布号 |
KR20090086045(A) |
申请公布日期 |
2009.08.10 |
申请号 |
KR20090009130 |
申请日期 |
2009.02.05 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SHIMATANI HIROSHI;SHIOYAMA NORIAKI |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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