发明名称 MANUFACTURING APPARATUS, INFORMATION PROCESSING METHOD, AND RECORDING MEDIUM HAVING PROGRAM THEREON
摘要 <p>A manufacturing apparatus, an information processing method, and a recording medium having program are provided to improve management efficiency of a part by managing and updating a use history of the part. A part identifying information receipt part(31) receives identifying information of a part used in a manufacturing apparatus(30). A part quality information receipt part(32) receives part quality information of the part identified by the part identifying information. A part quality correspondence information storage part(33) stores part quality correspondence information including the part identifying information and the part quality information. A part quality correspondence information managing part(34) updates the part quality correspondence information by using the part identifying information and the part quality information. A part removal detecting part(35) detects a removal of the part from the manufacturing apparatus.</p>
申请公布号 KR20090086045(A) 申请公布日期 2009.08.10
申请号 KR20090009130 申请日期 2009.02.05
申请人 TOKYO ELECTRON LIMITED 发明人 SHIMATANI HIROSHI;SHIOYAMA NORIAKI
分类号 H01L21/02 主分类号 H01L21/02
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