| 摘要 |
A probe unit is provided to reduce costs while improving the work efficiency compared with a conventional method by controlling the amount of overdriving of a probe unit without contact of a terminal electrode. A probe unit(10) comprises a fixing unit base(16) including a gas part of a probe unit and a moving element base(15) fixed to an upper block(13). Through holes(17a,17b) for bond passing through from the upper part to the lower-part are installed on the fixed base. A weight block is combined with the body while being mobile up/down and applying a creation weight to the probe, and if the contact force of weight block excess over a certain level and it is moved upwardly to suppress the increase of the contact. |
