| 摘要 |
A transport system is provided to suppress the electro static charge generated between a glass substrate and a tray by the friction and the separation. A transport system comprises a glass substrate(W) and a tray(1). The transport system returns the glass substrate put on the tray. A plurality of rollers is side by side arranged to the sending direction. The glass substrates of the insulating property are put on tray. The tray and the roller comprise a contact unit like an outward flange. The contact unit has the conductivity. The contact unit is earthed.
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