发明名称 SUBSTRAT DEMONTABLE.
摘要 <p>The invention relates to a process for manufacturing a composite substrate comprising bonding a first substrate onto a second semiconducting substrate, characterized in that the process includes, before bonding, the formation of a bonding layer between the first and the second substrate, the bonding layer comprising a plurality of islands distributed over a surface of the first substrate in a determined pattern and separated from one another by regions of a different type, which are distributed in a complementary pattern, wherein the islands are formed via a plasma treatment of the material of the first substrate.</p>
申请公布号 FR2914493(B1) 申请公布日期 2009.08.07
申请号 FR20070054077 申请日期 2007.03.28
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES SOCIETE ANONYME 发明人 ALLIBERT FREDERIC;KERDILES SEBASTIEN
分类号 H01L21/762 主分类号 H01L21/762
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