| 摘要 |
A chemicals supplying system and an apparatus for treatment of the substrate comprising the same are provided to prevent the decrease of production dud to a malfunction by sensing the amount of the chemicals inside each tank from a height sensor and a load cell. In a chemicals supplying system and an apparatus for treatment of the substrate comprising the same, the chemicals is stored in a tank(100). A chemical supply unit(110) supplies the chemical to the tank, and a feeding valve(122) controls the amount of the chemical supplied to the chemical usage unit in which the chemical stored within the tank is used. A height sensor(210) senses the height of the chemical stored within the tank, and a load cell(220) senses the weight of the chemical stored within the tank. A comparator(310) compares the value sensed in the height sensor and the value sensed in the load cell.
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