TEST HANDLER

摘要

A test handler is provided to maintain transfer of a driving force from a belt by controlling the tensile force by the center of pulley rotation. A soak chamber(310) pre-heats/pre-cool a semiconductor device, and a test chamber(320) connects the semiconductor device the tester. A transfer device transfers a carry board in which the semiconductor are stacked at the soak chamber and the test chamber. A belt drive system(200) reciprocates the transfer device between the soak chamber and the test chamber.