| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum pump for preventing condensation in a power source device. <P>SOLUTION: A condensation sensor 7 is provided in the power source device 3 provided as one unit with a vacuum pump body 2. When the condensation sensor 7 detects condensation in the power source device, CPU 8 closes a cooling water valve 6 to stop flow of cooling water circulating in the power source device through a cooling water channel 5. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
