| 摘要 |
PROBLEM TO BE SOLVED: To provide a rubbing device and a rubbing method so that the disordering and bending of a nap of rubbing cloth can be suppressed as the rubbing cloth comes into contact with a corner of a substrate. SOLUTION: The rubbing device 100 includes a stage 110 where a surface 120 having an alignment film 122 formed on its surface is mounted, a hollow 112 formed at the stage 110 and guiding at least one side 120a of the substrate 120, a suction hole 114a formed at the hollow 112 and adsorptively fixing the substrate 120, a rubbing processing section 130 for rubbing the orientation film 122, and a moving mechanism relatively moving the rubbing processing section 130 to the stage 110 in a predetermined direction from a side where the hollow 112 is formed, and the hollow 112 has a slope 112a inclined at least to the one side portion 120a. COPYRIGHT: (C)2009,JPO&INPIT
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