| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of suppressing damages to a semiconductor device, and to provide a probe card used therefor. SOLUTION: The inspection device for the semiconductor includes a contact terminal 10 for forming an electrical connection to the semiconductor device. The end 11 of the contact terminal 10 has an annular form with the inside which is a hollow space 12. The extreme end 11a of the contact terminal 10 exists in an annular form on the same plane. COPYRIGHT: (C)2009,JPO&INPIT
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