| 摘要 |
<p>A vacuum transportation device which can transport more objects in the vertical direction, which requires a reduced mounting volume, and which is reduced in size. The vacuum transportation device has a horizontal transportation mechanism (111) for transporting a substrate (100) in the horizontal direction, a vertical transportation mechanism (112) for transporting the substrate (100) in the vertical direction, a vacuum container (101) in which the horizontal transportation mechanism (111) and the vertical transportation mechanism (112) are placed, a horizontal drive section (113) having drive shafts (107a, 107b) for the XY-axis direction which are placed in the vacuum container (101) and driving the horizontal transportation mechanism (111) by means of the drive shafts (107a, 107b) for XY-axis direction, and a vertical drive section (114) having drive shafts (108a, 108b) for the Z-axis direction which is placed in the vacuum container (101) and driving the vertical transportation mechanism (112) by means of the drive shafts (108a, 108b) for Z-axis direction.</p> |
