Magnetron sputtering assembly has a ceramic cruciform electrical separator between magnetic system and drive

摘要

A magnetron sputtering assembly has a stationary target resting on a high voltage contact, a moving magnet that moves parallel with the target plane, and a magnet guide system coupled to a drive in contact with the earth. An electrical separating element is located between the magnetic system and the drive. The electrical separator (10) is a sliding cruciform unit fabricated of ceramic material and forming part of the magnetic slide system and drive.