Movable measuring sensor's position and/or movement detecting device for e.g. scanning force microscope, has light guiding units with beam guides provided for guiding light reflected by measuring sensors to light sensitive detector unit

摘要

The device has two light-guiding units (LE) assigned to two measuring sensors (6). Each light guiding unit exhibits beam guides that are spatially separated from one another, where the beam guides are provided for guiding light (10) reflected by the respective measuring sensors to a light sensitive detector unit (20). The light-guiding units are assigned on an output side to the light sensitive detector unit. One of the light-guiding units is assigned at the input side to an optical element, and another light-guiding unit is assigned at an output side to an optical element.