| 摘要 |
PROBLEM TO BE SOLVED: To improve the cooling efficiency of an observation window and make the maintenance work easy. SOLUTION: The apparatus for producing polycrystalline silicon has an observation window unit 10 installed at the opening section 4 of a wall 2 of a reaction furnace through which the inside of the furnace can be observed. The observation window unit 10 is equipped with a housing frame 13 for fixing an inside window plate 11 and an outside window plate 12 at intervals so as to correspond to the opening section 4, a hinge for turnably supporting the housing frame 13 between the closing position to close the opening section 4 and the opening position to open the opening section 4, and water supply and drain pipes 16, 17 for circulating cooling water into the space 15 surrounded by the housing frame 13 and both window plates 11, 12. COPYRIGHT: (C)2009,JPO&INPIT
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