| 摘要 |
PROBLEM TO BE SOLVED: To provide a method suitable for manufacturing an optical scanner for executing optical scanning by vibrating magnetically an oscillator having a mirror reciprocation-swingingly, to prevent the warpage and waviness of a mirror surface from being generated caused by a thermal remaining stress strain in an inside of the oscillator. SOLUTION: The oscillator 40 includes a body part 12, and a laminate 34 attached locally onto a surface of the body part, the laminate 34 is laminated with the mirror 18 and a magnetic coil 32 each other. The laminate 34 is thereafter manufactured independently from the body part 12, by (a) manufacturing nonheatingly the body part 12 and by (b) laminating heatingly the mirror and the magnetic coil, (c) the body part 12 and the laminate 34 are bonded each other nonheatingly, thus the oscillator 40 is completed. COPYRIGHT: (C)2009,JPO&INPIT
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