发明名称 Semiconductor Device Singulation Method
摘要 The objective of the invention is to provide a semiconductor device manufacturing method with which the generation of burrs can be suppressed while increasing the singulation speed of the package. In a manufacturing method of a QFN package of the present invention, a molding prepared by sealing a lead frame with plural semiconductor chips carried on it en bloc with a resin; the operation comprises the following processing steps: a first singulation processing step S101 in which the molding is half-cut along the cutting plane; a de-flashing processing step S102 in which the burrs on the cut portion of the half-cut molding are removed; and a second singulation processing step S103 in which the de-flashed molding is completely cut along the cutting plane.
申请公布号 US2009197373(A1) 申请公布日期 2009.08.06
申请号 US20090400499 申请日期 2009.03.09
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MASUMOTO MUTSUMI
分类号 H01L21/768 主分类号 H01L21/768
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