| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater capable of suppressing the degradation of strength of a joint part caused by heating. SOLUTION: The ceramic heater includes a plate part 10 formed of a first ceramic sintered body for placing a heated object on the upper face, and a shaft part 12 jointed to the lower face of the plate part 10. The shaft part 12 has a first member 14 joined at one end to the lower face of the plate part 10 and formed of a ceramic sintered body of the same composition as the first ceramic sintered body, and a second member 16 joined to the other end of the first member 14 and formed of a second ceramic sintered body lower in heat conductivity than the plate part 10. COPYRIGHT: (C)2009,JPO&INPIT
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