| 摘要 |
PROBLEM TO BE SOLVED: To give breakdown voltage treatment to a substrate to be treated without providing a mechanism for electrostatically fixing it. SOLUTION: Power sources 52a, 52b are electrically connected to a treatment electrode 34 and a voltage specifying electrode 64, respectively, and they are each specified to be at predetermined potential. Negative high voltage is applied to the treatment electrode 34, while positive high voltage is applied to the voltage specifying electrode 64. The front face substrate 11 is not electrically connected thereto, and it is set to be at floating potential. COPYRIGHT: (C)2009,JPO&INPIT
|
