| 摘要 |
PROBLEM TO BE SOLVED: To efficiently store and deliver a load in a storage warehouse for storing and delivering a load to house various substrates for manufacturing a semiconductor element, for example, between it and a transport vehicle. SOLUTION: This storage warehouse (10) comprises a body part, inside of which is divided into plural stages and on one side of which along a truck inlets/outlets capable of storing and delivering a load (3) are aligned on each stage and along a truck (1); a plurality of loading parts (21) arranged to be enlarged in two horizontal directions at each of plural stage in the body part, and capable of housing or loading the load and moving the load between the parts horizontally, a plurality of storing/delivering ports (11) arranged at a position adjacent to the inlets/outlets outside the body part, and an inward/outward movement means (12) capable of horizontally moving the load via the inlets/outlets between one loading part adjacent to the inlets/outlets and the storing/delivering port at each of plural stages. COPYRIGHT: (C)2009,JPO&INPIT
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