发明名称 INFORMATION PROCESSING APPARATUS AND METHOD
摘要 <p>An information processing apparatus includes an obtaining unit configured to obtain first information regarding a distribution of reflected light from a target to be measured and second information regarding geometrical-optics components of the reflected light, a calculating unit configured to calculate third information on the basis of the first information and the second information, the third information indicating an approximation of the distribution of reflected light, and an output unit configured to output information regarding wave-optics components of the reflected light on the basis of the third information.</p>
申请公布号 WO2009096592(A2) 申请公布日期 2009.08.06
申请号 WO2009JP51829 申请日期 2009.01.28
申请人 CANON KABUSHIKI KAISHA;YOSHIKAWA, HIROSHI;MITARAI, YUSUKE;TAKIMOTO, MASAFUMI;OTA, KAZUYUKI;SAITOH, KENJI;MATSUGU, MASAKAZU 发明人 YOSHIKAWA, HIROSHI;MITARAI, YUSUKE;TAKIMOTO, MASAFUMI;OTA, KAZUYUKI;SAITOH, KENJI;MATSUGU, MASAKAZU
分类号 G01N21/47;G01N21/57 主分类号 G01N21/47
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