发明名称 Integrated Circuit Packaging Using Electrochemically Fabricated Structures
摘要 Embodiments of the invention provide methods for packaging integrated circuits and/or other electronic components with electrochemically fabricated structures which include conductive interconnection elements. In some embodiments the electrochemically produced structures are fabricated on substrates that include conductive vias while in other embodiments, the substrates are solid blocks of conductive material, or conductive material containing passages that allow the flow of fluid to maintain desired thermal properties of the packaged electronic components.
申请公布号 US2009197371(A1) 申请公布日期 2009.08.06
申请号 US20090349768 申请日期 2009.01.07
申请人 MICROFABRICA INC. 发明人 COHEN ADAM L.;ARAT VACIT;LOCKARD MICHAEL S.;FOLK CHRISTOPHER R.;KILGO, III MARVIN M.
分类号 H01L21/50 主分类号 H01L21/50
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