| 摘要 |
PROBLEM TO BE SOLVED: To provide a storage capable of continuously depositing and delivering a cargo to store various substrates for manufacturing semiconductor devices between itself and a carrier vehicle such as, for example, a vehicle, etc. and capable of efficiently depositing and delivering the cargo in simple constitution. SOLUTION: This storage 10 is furnished with a case body 10a, (i) a first shelf part arranged in the case body, free to place the first cargo and the other cargo 3 on it, constituted free to horizontally move between the inside and the outside of the case body through a first entrance provided on an outside wall of the case body and to function as a depositing port on which the first cargo is placed by vertically placing from the carrier vehicle 2 when it is moved to the outside, (ii) a plurality of shelf parts 15 positioned upward above the first shelf part and arranged in the vertical direction including the other shelf part to function as a delivering port from which the other cargo is fetched out by lateral transferring and placing to the carrier vehicle through the other entrance provided on the outside wall of the case body and an outside inside moving means 21 to selectively and horizontally move the first shelf part to the outside and the inside. COPYRIGHT: (C)2009,JPO&INPIT |
