| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a vibrating mirror made of metallic material, whose characteristic variations are prevented. SOLUTION: A plate material made of metallic material is pressed to form a vibrator, which vibrates in a reciprocating manner taking a beam 3 as a torsional rotation axis and which is made of metallic material. A support part 4 supporting a mirror of the vibrator includes a resonance frequency control piece 22. Subsequently a mirror 5 is fixed to the support part 4. The projecting direction of the resonance frequency control piece 22 from the support part 4 is changed to vary the inertia moment, thereby controlling the resonance frequency. Thus, the resonance frequency of the vibrating mirror can be easily controlled. Further, since working chips are not generated, the optical characteristics of the mirror are not deteriorated by adhesion of working chips to the mirror. COPYRIGHT: (C)2009,JPO&INPIT
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