| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared detection element prevented from touching a recessed part in a substrate even if a beam is bent and a manufacturing method for the detection element. SOLUTION: This infrared detection element includes a silicon substrate 101 with the recessed part 122 formed therein, an infrared light receiving part 130 having a polysilicon layer 104, and the beam having at least two bend parts 140 supporting the receiving part 130 above the recessed part 122 and extending from the receiving part 130 along the side of the receiving part 130 to join with the substrate 101. At least one bend part 140 of the beam is provided in a position on the opposite side of the recessed part 122 relative to the polysilicon layer 130. COPYRIGHT: (C)2009,JPO&INPIT
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