| 摘要 |
PROBLEM TO BE SOLVED: To maintain highly accurate conveyance by minimizing an attitude change of an arm caused by a thermal influence when conveying a high temperature substrate, in a horizontally articulated robot. SOLUTION: In this horizontally articulated robot, the arm is constituted of a transmission mechanism for transmitting a rotating operation from a driving part 1, an arm case 201 for storing the transmission mechanism and an arm cover 214 mounted on an upper surface of the arm case 201 to cover the transmission mechanism. The arm cover 214 is constituted of a plurality of arm covers divided in a direction in which the arm case 201 is extended, and the plurality of arm covers 214 form mutually-folded parts. COPYRIGHT: (C)2009,JPO&INPIT
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