| 摘要 |
A sensor includes a piezoelectric substrate and conductive elements formed in or over the substrate. The sensor also includes a sensing layer formed over the substrate. The sensing layer has one or more properties (such as a mass loading, an electrical property, or a visco-elastic property) that vary based on at least one measurand to be measured by the sensor (such as carbon dioxide). This may affect, for example, a propagation velocity of acoustic waves in the sensor and/or a resonant frequency of the sensor. The sensing layer includes a combination of polyaniline and carbonic anhydrase. The combination of polyaniline and carbonic anhydrase could be formed using an emeraldine base. For instance, an aniline can be dissolved in water to form a mixture, and hydrochloric acid and an oxidant can be added to the mixture. A chemical polymerization of the aniline in the mixture can be performed to form polyanilne.
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