发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE
摘要 According to an aspect of the present invention, there is provided a semiconductor memory device. The semiconductor memory device is provided with an insulator and a capacitor. The capacitor is provided with a lower electrode provided with an inner portion and an outer portion, a dielectric portion on the lower electrode, and an upper electrode on the dielectric portion. The inner portion is provided with a lower part and an upper part upwardly extending from the lower part. The insulator laterally holds the lower part. The outer portion is arranged on the insulator and is electrically connected with the upper part.
申请公布号 US2009197384(A1) 申请公布日期 2009.08.06
申请号 US20090423905 申请日期 2009.04.15
申请人 ELPIDA MEMORY, INC. 发明人 IIJIMA SHINPEI
分类号 H01L21/02 主分类号 H01L21/02
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