| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mastering machine using a liquid-immersion differential drainage static pressure surfacing pad not only preventing a liquid from leaking out of a static surfacing pad, but also causing no fluctuation of an irradiated light. <P>SOLUTION: This mastering machine is equipped with a static pressure surfacing pad B having not only a liquid-immersed object lens 111 immersed in a liquid for lens immersion L for irradiating an irradiated light exposably to a moving master 10, but also an exit aperture 112a placed opposite to the master 10 with a fine distance for irradiating an irradiated light to the master through the liquid-immersed object lens 111. The machine also includes: ring-shaped air supplying grooves 114 to 116 formed in a plurality around the exit aperture 112a and on a face 110a of the static pressure surfacing pad B confronted with the master 10 which are opened toward the master 10; and a pressure-regulating means F1 for regulating air pressures of air supplying grooves 114 to 116 so that the air pressures become gradually higher from the air pressure of an air supplying groove in the most inner circumference side to that of an air supplying groove in the most outer circumference side. <P>COPYRIGHT: (C)2009,JPO&INPIT |
