| 摘要 |
A method for preparing a photonic crystal slab waveguides is disclosed, wherein the photonic crystal slab waveguides are prepared by combining near-field phase-shifting contact lithography (NFPSCL) with interference lithography (IL). Conventional methods used for preparing the photonic crystal slab waveguides, such as electron beam lithography or direct laser writing, are time consuming. In contrast, the present method allows rapid production of many photonic crystal slab waveguides over a large area composed of microstructures.
|
