| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor having improved certainty of anode joint. <P>SOLUTION: This dynamic quantity sensor is equipped with the first structure of the first semiconductor material having a fixed part, a displacement part, a connection part, and a plurality of first block members unconnected thereto and separated mutually; the second structure of the second conductive semiconductor material having a pedestal, a weight part, and a plurality of second block members; a joint part constituted of an insulating material, for jointing the first and second structures; the first substrate laminated and arranged on the second structure; the second substrate laminated and arranged on the first structure; a plurality of first conduction parts for connecting electrically the plurality of first and second block members respectively through the third structure; and a plurality of second conduction parts connected electrically to the plurality of second block members respectively through the second substrate. <P>COPYRIGHT: (C)2009,JPO&INPIT |
