| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrooptical device which does not cause a defect when dividing a laminated substrate formed through the lamination of a plurality of substrates by a scribing method, and also to provide an electrooptical device. <P>SOLUTION: In areas corresponding to the divided areas of a first substrate, a reformed area is formed by irradiating laser beam from one surface of the first substrate to an area where a non-reformed area with a predetermined thickness is remained and a second substrate is laminated on the other surface on the opposite side to the one surface of the first substrate through an adhesive layer. In areas corresponding to the divided areas of the second substrate, a reformed area is formed by irradiating laser beam from a surface on the adhesive side of the second substrate to an area where a non-reformed area with a predetermined thickness is remained, and a crack is caused from the non-reformed area as a base point on the first and second substrates. Then, the first and second substrates are divided at the divided areas. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
