| 摘要 |
PROBLEM TO BE SOLVED: To provide a tester for a ceramic wiring board capable of improving inspection efficiency by shortening the moving time of a probe pin even when the position of an inspection point is shifted while capable of inspecting a plurality of inspection points at the same time. SOLUTION: A tester for a ceramic wiring board comprises: a plurality of probe pins 1 arranged to be in contact with the inspection points 10 of both surfaces of a ceramic wiring board 8; a probe pin supporting part turnably supporting the probe pins 1 in the XY plane; a driving part 3a, mounted on this probe pin supporting part, finely adjusting the position of the probe pins 1; a driving part 3b advancing or retreating the plurality of probe pin supporting parts as a single unit in each of X-axis, Y-axis, and Z-axis directions; a CCD camera 4 photographing the inspection point 10; a data processing part 5 processing the image data; and a control part 6 controlling the motion of the driving parts 3a, 3b based on the processing results. COPYRIGHT: (C)2009,JPO&INPIT
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