| 摘要 |
PROBLEM TO BE SOLVED: To provide an extreamely highly convenient floating zone melting device suppressing occurrence of deposits on an inner wall of a transparent quartz tube and facilitating to continue stable growth of a single crystal by using the transparent quartz tube for a long period of time. SOLUTION: The floating zone melting device 10 employs an IR ray focusing and heating system; in which a sample rod 14 is placed in a sample chamber 12 comprising a transparent quartz tube, and while an atmospheric gas 32 is allowed to flow into the sample chamber 12, the sample rod 14 is heated and melted by focusing IR rays radiated from a plurality of IR ray irradiation means 18 to obtain a melt 22 of the sample rod 14, and the melt 22 is solidified on a seed crystal to grow a single crystal 24. The device is provided with a gas conduit 26 made of transparent quartz between the inner wall of the sample chamber 12 and the sample rod 14, for efficiently discharging a vaporized product generating during heating and melting the sample rod 14 to the outside of the sample chamber 12 together with the atmospheric gas 32. COPYRIGHT: (C)2009,JPO&INPIT
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