| 摘要 |
<p>A method for detecting an endpoint in process, said method comprises the steps of: searching a peak or s flat of a spectrum signal, setting the peak or the flat as a inflexion; said peak is a spectrum signal which intensity is more than the intensity of its left and right signal; said flat is a spectrum signal that the intensity of its left signal is less than its intensity, and the intensity of its right signal fluctuates in the range of satisfactory. Time of a process endpoint is determinated according to the inflexion. A device for detecting an endpoint in process is further disclosed.</p> |
