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发明名称
HERSTELLUNGSVERFAHREN FÜR HALBLEITERBAUELEMENT
摘要
申请公布号
DE60139068(D1)
申请公布日期
2009.08.06
申请号
DE20016039068
申请日期
2001.04.03
申请人
NXP B.V.
发明人
STOLK, PETER A.;WOERLEE, PIERRE H.;KNITEL, MATHIJS J.;VAN BRANDENBURG, ANJA C.
分类号
H01L21/28;H01L21/8238;H01L21/265;H01L21/266;H01L21/336;H01L27/092;H01L29/10;H01L29/417
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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