| 摘要 |
PROBLEM TO BE SOLVED: To provide an active magnetic shield device and active magnetic shielding method for effectively canceling the magnetic noise of an important space region requiring magnetic shielding inside an electron beam drawing device. SOLUTION: This active magnetic shielding device for eliminating magnetic noise in predetermined space includes a sensor 100 for detecting a magnetic field disposed out of the predetermined space; a canceling coil 500 for eliminating the generated magnetic noise; a magnetic field estimating section 200 for estimating the magnetic noise in the predetermined space, based on the magnetic field detected by the sensor 100 for detecting the magnetic field; a current arithmetic section 300 for calculating the current for generating the magnetic noise estimated by the magnetic field estimating section 200 with the canceling coil 500; and a cancel coil control section 400 for carrying to the current arithmetic section 300, a current that includes magnitude equal to that of the current calculated by the current arithmetic section, with a sign opposite to the coil 500. COPYRIGHT: (C)2009,JPO&INPIT
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