| 摘要 |
PROBLEM TO BE SOLVED: To accurately perform the setting to a prescribed position for supporting a lower tank by suitably supporting the lower tank, when the lower tank opening the bottom part is exchanged, and restraining the thermal influence. SOLUTION: The lower tank 3 opening the bottom face in a vacuum-degassing apparatus 1 and a carriage 11 for exchanging the lower tank, are included, and on the outer circumference at the upper part of the lower tank 3, a depositing seat 5 having a receiving part 6 toward the lower face, is arranged. The carriage 11 for exchanging the lower tank, has a supporting table 41 provided with an insert-supporting part 45 which is insertable into the receiving part 6, and the supporting table 41 is freely ascended/descended with an ascending/descending device 14 through a supporting plate 31 and a basic table part 21. The supporting table 41 can be shifted to the front and rear, and the right and left directions to the basic table part 21. COPYRIGHT: (C)2009,JPO&INPIT
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