发明名称 |
GAS MIXER AND MANIFOLD ASSEMBLY FOR ALD REACTOR |
摘要 |
A system and method for mixing a plurality of gases for an atomic layer deposition (ALD) reactor. The mixer is configured to mix the plurality of gases while minimizing the potential for re-circulation within the mixer. The mixer is further configured to maintain the flow velocity of the plurality of gases as the gases pass through the mixer.
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申请公布号 |
US2009196992(A1) |
申请公布日期 |
2009.08.06 |
申请号 |
US20090398938 |
申请日期 |
2009.03.05 |
申请人 |
ASM AMERICA, INC. |
发明人 |
SCHMIDT RYAN M.;VERGHESE MOHITH |
分类号 |
C23C16/448;C23C16/44;C23C16/455 |
主分类号 |
C23C16/448 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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