PROBE UNIT

摘要

Disclosed is a probe unit for suppressing decrease of permissible current caused by reduced probe diameter, comprising: a plurality of large-diameter probes; a plurality of small-diameter probes smaller in diameter than the large-diameter probes; a large-diameter probe holder including a plurality of large hole parts for individually holding the plurality of large-diameter probes and a plurality of receiving hole parts of smaller diameter than the large hole parts that communicate with any of the plurality of large hole parts and that receive the small-diameter probes in a state in which the end parts thereof are in contact with the large-diameter probes, a set of intercommunicating large hole parts and receiving hole parts passing therethrough in the thickness direction; and a small-diameter probe holder in which a plurality of small hole parts for individually holding the plurality of small-diameter probes in an engaged state are provided to pass therethrough in the thickness direction, and which is laminated on the large-diameter probe holder so that the small hole parts communicate with any of the plurality of receiving hole parts. The longitudinal center axes of the intercommunicating large hole parts and small hole parts are offset, and the center to center distance between two adjacent small hole parts of the plurality of small hole parts is smaller than the center to center distance between the two large hole parts respectively correspondent thereto.