| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and inspection device that radiate lights of two different wavelengths, transmit or reflect the lights on an object to be inspected, determine the difference between data of two images, and detect a defect of the object to be inspected, based on the difference. SOLUTION: The object to be inspected is illuminated with the lights of two different wavelengths including blue light, the difference between data of two images created, based on the lights having been transmitted or reflected on the object to be inspected is determined, and the defect of the object to be inspected is detected based on the difference. This inspection device includes an illuminating means for illuminating the object to be inspected with the lights of two different wavelengths, including blue light; an imaging means for imaging two images after the object to be inspected is illuminated with the lights of two different wavelengths by the illuminating means, and the lights are transmitted or reflected on the object to be inspected; and an imaging processing means for detecting the defect of the object to be inspected from the data of two images of the imaged object to be inspected. The difference between the data of two images obtained by the imaging means is determined, and the defect of the object to be inspected is detected. COPYRIGHT: (C)2009,JPO&INPIT
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