| 摘要 |
PROBLEM TO BE SOLVED: To provide a slit coat type coating device and a coating method which are realized at a relatively reduced cost and can form a uniform coating thickness. SOLUTION: The device includes a hold table 20 holding a substrate 1 on the surface of a lower side in a vertical direction, a first liquid vessel 30 arranged facing to the surface of the substrate 1 held by the hold table 20 and storing a predetermined coating solution 2, a coating head 40 held movably in a vertical direction in the first liquid vessel 30 and having a slit type nozzle 41 flowing out a coating solution stored in the first liquid vessel 30 toward the surface of the substrate 1, and a second liquid vessel 50 held movably in a vertical direction and storing the coating solution 2 communicating to the first liquid vessel 30 through a communicating pipe 60; and is provided with a control means controlling the height of the second liquid vessel 50 corresponding to movement of the coating head 40 when coating the substrate 1 with the coating solution 2. COPYRIGHT: (C)2009,JPO&INPIT
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