| 摘要 |
PROBLEM TO BE SOLVED: To provide a conductive member using a ceramic substrate which can be efficiently manufactured corresponding to fine pitches even it is a small amount. SOLUTION: The conductive member includes conductive through-holes, which are formed by imparting conductivity to the inside through-holes formed between one main face of an insulating ceramic substrate and the other main face opposed to it, and both main faces of the conductive member are electrically connected by this conductive through-hole, wherein the Vickers hardness of the ceramic substrate is 5 GPa or lower, the conductive through-holes have diameters of 10-500 μm, aspect ratios of 2-40 and hole diameter precision of ±20 μm or lower, furthermore, its positional precision with respect to a reference position is ±20 μm or lower. It is preferable that at least one through-hole forming the conductive through-hole is formed by performing a mechanical fabrication or laser fabrication to the ceramic substrate after heat treatment for hardening, or by including a conductor wiring pattern electrically connected to the conductive through-hole. COPYRIGHT: (C)2009,JPO&INPIT
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