| 摘要 |
<P>PROBLEM TO BE SOLVED: To quickly prevent impact when a substrate is separated from a peeling roller, and to allow a supporting layer to peel off from the substrate in excellent and highly precise manner, by a simple composition. <P>SOLUTION: A base automatic peeling apparatus 100 comprises: a peeling roller 104, which continuously peels off a base film 26 from a glass substrate 24; and a plurality of guide rollers 106, which are arranged along the axial direction of the peeling roller 104 at the glass substrate 24 side, and are capable of holding the glass substrate 24 when the base film 26 is peeled off. The guide rollers 106, which are arranged at both end sides with respect to the axial direction of the peeling roller 104, are arranged at a higher position than the guide rollers 106, which are arranged in the central sides with respect to the axial direction of the peeling roller 104. <P>COPYRIGHT: (C)2009,JPO&INPIT |
