CLEANING PROCESS AND CLEANING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method which does not need the use of a detergent and is compact and high in cleaning performance.

SOLUTION: Liquid is made to flow in a conveyance path 1 and pressurized, and a pulsating flow is generated. Gas is supplied to the liquid flowing in the conveyance path 1, pressurized, and dissolved to form the liquid saturated with the gas. The pressure of the gas-saturated liquid is reduced to the atmospheric pressure. The decompressed liquid is ejected to an object 6 to be cleaned. Bubbles are formed on the interface between the fouling of the surface of the object 6 to be cleaned and the ejected liquid to remove the fouling Y.

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