| 摘要 |
PROBLEM TO BE SOLVED: To convert freely the tip shape of a workpiece corresponding to a purpose, for example, removal of dust; to cope easily with a case wherein the workpiece is polluted; and to recognize a defect even when operated by a beginner operator, regardless of a skill of the operator. SOLUTION: This system is equipped with tweezers 12 comprising two probes assembled into a scanning probe microscope, and having respectively an explorer arranged oppositely to a sample which is an observation or processing object on each tip; and a plurality of kinds of replacement workpieces one of which is gripped alternatively by the tweezers. As the replacement workpiece, an explorer workpiece for observation, a workpiece for a contact hole, a workpiece for corner movement, a workpiece for cutting, and a spatula-shaped workpiece are enumerated. COPYRIGHT: (C)2009,JPO&INPIT |
