| 摘要 |
PROBLEM TO BE SOLVED: To provide a disk inspecting device and method suitable for the simultaneous inspection of a disk surface (a recording surface part) and an end face (an edge part) and the simultaneous inspection of both faces. SOLUTION: The surface of the disk 12 held in a vertical attitude is irradiated with illumination light of an illumination light pattern serving as an irradiation range of almost the same shape as an inspection area including an edge, from lighting systems 112, 114, 116, 118, and reflected light from the inspection area portion including the edge is imaged by cameras 102, 104. The illumination light is shaped in its illumination pattern shape using a light guide such as an optical fiber and irradiated along the tangential direction of texture of the disk 12. Images obtained from the cameras 102, 104 are analyzed, and the center position and radius of the disk are determined to automatically form a window of each inspection face. A reflection shape at the edge part is recognized from the inspection image, and based on the reflection shape, dust and factors other than the dust are discriminated to detect and measure the dust. COPYRIGHT: (C)2009,JPO&INPIT
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