| 摘要 |
PROBLEM TO BE SOLVED: To easily evaluate dielectric loss tangent values in a required frequency band without requiring processes such as machining substrate to be measured into a specific shape. SOLUTION: A dielectric loss tangent evaluation method comprises the first step for forming a coplanar line in the surface of a substrate to be measured 30; the second step for determining S-parameters; the third step for determining an attenuation constantα<SB>m</SB>of the coplanar line on the basis of the S-parameters; the fourth step for determining an attenuation constantα<SB>c</SB>of the coplanar line on the basis of an equivalent circuit of the coplanar line; and the fifth step for evaluating a dielectric loss tangent value having a minimum difference between the attenuation constantα<SB>m</SB>and the attenuation constantα<SB>c</SB>as a dielectric loss tangent value of the substrate to be measured. A small-signal characteristic evaluation apparatus for determining S-parameters comprises a network analyzer 24; a stage 28 for mounting substrates to be measured; and probe heads 32-1 and 32-2. The substrate to be measured is mounted to the stage for mounting substrates to be measured. COPYRIGHT: (C)2009,JPO&INPIT
|
