发明名称 LITHOGRAPHICALLY PATTERNED NANOWIRE ELECTRODEPOSITION
摘要 Lithographically patterned nanowire electrodeposition (LPNE) combines attributes of photolithography with the versatility of bottom-up electrochemical synthesis. Photolithography is employed to define the position of a sacrificial nanoband electrode, preferably formed from a metal such as nickel, copper, silver, gold or the like, which is stripped using electrooxidation or a chemical etchant to advantageously recess the nanoband electrode between a substrate surface and the photoresist to form a trench defined by the substrate surface, the photoresist and the nanoband electrode. The trench acts as a "nanoform" to form an incipient nanowire during its electrodeposition. The width of the nanowire is determined by the electrodeposition duration while its height is determined by the height of the nanoband electrode.
申请公布号 US2009197209(A1) 申请公布日期 2009.08.06
申请号 US20070376209 申请日期 2007.08.21
申请人 THE REGENTS OF THE UNIVERSITY OF CALIFORNIA 发明人 PENNER REGINALD M.;MENKE ERIK J.;THOMPSON MICHAEL A.;XIANG CHENGXIANG
分类号 G03F7/20 主分类号 G03F7/20
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