| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface modification method that imparts excellent friction characteristics while retaining high fatigue strength, and a powertrain component manufactured thereby. <P>SOLUTION: The surface modification method includes: a first step of subjecting a substrate 11 to rapid induction hardening so that the substrate is hardened at depths of≤1.5 mm; and a second step of sequentially depositing an interlayer 12 and a coating layer 13, wherein the substrate temperature is kept at≤473 K at deposition. The interlayer 12 is formed by depositing a Me-DLC film on the substrate 11 in such a manner as to gradually increase hardness of the interlayer 12 toward its surface, i.e. by keeping sputtering power of a carbon target constant and gradually decreasing sputtering power of a tungsten target. The coating layer 13 is formed by alternately depositing Me-DLC films 13a containing a prescribed amount of W and DLC films 13b, each having a prescribed thickness, so that films with different hardness are alternately deposited. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
