FORMING METHOD OF COATED PATTERN AND FORMING METHOD OF PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a forming method of a coated pattern capable of forming a coated pattern without using CVD, and a forming method of a high density pattern using the method. SOLUTION: After forming a coating film 3 by coating thermal polymerization composition on a thermally conductive substrate 1 having a pattern 2, a coated pattern 7 is formed by baking and developing. After forming an inorganic composition film on the coated pattern, a higher density pattern can be formed by etching. COPYRIGHT: (C)2009,JPO&INPIT